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Surface profiling and features measurement
Using AEP profilers — contact and/or optical based techniques AEP metrology can virtually do
Surface profiling such as defect measurement, surface feature analysis etc.for any type of surface.
- Step Height with sub angstrom resolution
- Surface roughness with sub Angstrom resolution
- Wear Track, Scratch Depth, Pile up measurement
- Flatness, Bow, Radius of curvature etc. measurement
- Thin Film Stress measurement
- Film/ Coating thickness
- Surface profiling and features measurement
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NanoMap-500LS
